Simulation of Impact Rupture in Polysilicon Mems

Author

Corigliano, Alberto ; Cacchione, Fabrizio ; Frangi, Attilio ; Zerbini, Sarah

Author_Institution

Dept. of Struct. Eng., Politecnico di Milano, Milan

fYear

2006

fDate

24-26 April 2006

Firstpage

1

Lastpage

6

Abstract

The problem of impact rupture in polysilicon MEMS is addressed in this paper employing a numerical 2D geometrical model of the polycrystal obtained by means of a Voronoi tessellation coupled with a FE mesh. The intergranular and transgranular rupture is simulated by means of cohesive traction-jumps softening laws; accidental drop is simulated through a simplified three-level multi scale approach

Keywords

computational geometry; finite element analysis; fracture; impact strength; impact testing; micromechanical devices; 2D geometrical model; Voronoi tessellation; accidental drop simulation; cohesive traction-jumps softening laws; finite element model; impact rupture; intergranular rupture; polysilicon MEMS; transgranular rupture; Assembly systems; Crystallization; Finite element methods; Iron; Mechanical systems; Mesh generation; Micromechanical devices; Softening; Solid modeling; Structural engineering;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on

Conference_Location

Como

Print_ISBN

1-4244-0275-1

Type

conf

DOI

10.1109/ESIME.2006.1643984

Filename

1643984