Title :
Simulation of Impact Rupture in Polysilicon Mems
Author :
Corigliano, Alberto ; Cacchione, Fabrizio ; Frangi, Attilio ; Zerbini, Sarah
Author_Institution :
Dept. of Struct. Eng., Politecnico di Milano, Milan
Abstract :
The problem of impact rupture in polysilicon MEMS is addressed in this paper employing a numerical 2D geometrical model of the polycrystal obtained by means of a Voronoi tessellation coupled with a FE mesh. The intergranular and transgranular rupture is simulated by means of cohesive traction-jumps softening laws; accidental drop is simulated through a simplified three-level multi scale approach
Keywords :
computational geometry; finite element analysis; fracture; impact strength; impact testing; micromechanical devices; 2D geometrical model; Voronoi tessellation; accidental drop simulation; cohesive traction-jumps softening laws; finite element model; impact rupture; intergranular rupture; polysilicon MEMS; transgranular rupture; Assembly systems; Crystallization; Finite element methods; Iron; Mechanical systems; Mesh generation; Micromechanical devices; Softening; Solid modeling; Structural engineering;
Conference_Titel :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location :
Como
Print_ISBN :
1-4244-0275-1
DOI :
10.1109/ESIME.2006.1643984
