Title :
Role of thermal stress in athermal waveguide design using TiO2 waveguides on a silicon substrate
Author :
Bovington, J.T. ; Wu, R. ; Cheng, K.T. ; Bowers, John E.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California Santa Barbara, Santa Barbara, CA, USA
Abstract :
Experimental demonstrations of ring resonators with TiO2 cores are presented and measured with -2.9pm/K resonance shift. Their thermo-stress-optic behavior was found to be important to their function; therefore an inclusive model is presented and simulated numerically.
Keywords :
elemental semiconductors; integrated optics; numerical analysis; optical design techniques; optical resonators; optical waveguides; silicon; thermal stresses; thermo-optical effects; titanium compounds; Si; TiO2-Si; athermal waveguide design; numerical simulation; resonance shift; ring resonators; silicon substrate; thermal stress; thermo-stress-optic behavior; Indexes; Mathematical model; Optical waveguides; Silicon; Stress; Temperature measurement;
Conference_Titel :
Photonics Conference (IPC), 2013 IEEE
Conference_Location :
Bellevue, WA
Print_ISBN :
978-1-4577-1506-8
DOI :
10.1109/IPCon.2013.6656513
