Title :
Design and analysis of a novel electro-optical MEMS gyroscope for navigation applications
Author :
Waters, Richard ; Tally, Charles ; Dick, Brian ; Jazo, Hugo ; Fralick, Mark ; Kerber, Maxwell ; Wang, Andrew
Author_Institution :
Adv. Circuits & Sensors Branch, Space & Naval Warfare Syst. Center Pacific (SSC Pacific), San Diego, CA, USA
Abstract :
A novel gyroscope design is presented that has potential to reach navigation-grade performance, i.e. bias instability <; 0.01 °/hr and Angle Random Walk (ARW) <; 0.001 °/√hr. The design is based on the incorporation of an optical transduction mechanism used to decouple drive and sense signals, a dual crystalline silicon spring fabrication approach along with a large drive mass and small sense mass to enhance Coriolis displacement.
Keywords :
electro-optical devices; gyroscopes; micromechanical devices; navigation; springs (mechanical); Coriolis displacement; Si; angle random walk; bias instability; decouple drive; dual crystalline silicon spring fabrication; electro-optical MEMS gyroscope; navigation applications; optical transduction mechanism;
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2010.5689922
