DocumentCode
2115293
Title
MVT corrections for the evaluation of damping in MEMS
Author
Cercignani, Carlo ; Frangi, Attilio ; Lorenzani, Silvia ; Vigna, Benedetto
Author_Institution
Politecnico di Milano
fYear
2006
fDate
24-26 April 2006
Firstpage
1
Lastpage
8
Abstract
The analysis of fluid damping in micro-electro-mechanical-systems (MEMS) is addressed. A mixed fast multipole boundary element method based on both velocity and traction integral equations is employed and adapted in order to account for slip boundary conditions. The formulation presented is applied to the analysis of a biaxial accelerometer and validated with experimental results
Keywords
accelerometers; boundary integral equations; damping; micromechanical devices; traction; MEMS; MVT corrections; biaxial accelerometer; fluid damping; microelectro-mechanical-systems; mixed velocity traction; multipole boundary element method; slip boundary conditions; traction integral equations; velocity integral equations; Accelerometers; Boundary conditions; Boundary element methods; Damping; Frequency; Integral equations; Large-scale systems; Micromechanical devices; Robustness; Stators;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location
Como
Print_ISBN
1-4244-0275-1
Type
conf
DOI
10.1109/ESIME.2006.1644006
Filename
1644006
Link To Document