Title :
MVT corrections for the evaluation of damping in MEMS
Author :
Cercignani, Carlo ; Frangi, Attilio ; Lorenzani, Silvia ; Vigna, Benedetto
Author_Institution :
Politecnico di Milano
Abstract :
The analysis of fluid damping in micro-electro-mechanical-systems (MEMS) is addressed. A mixed fast multipole boundary element method based on both velocity and traction integral equations is employed and adapted in order to account for slip boundary conditions. The formulation presented is applied to the analysis of a biaxial accelerometer and validated with experimental results
Keywords :
accelerometers; boundary integral equations; damping; micromechanical devices; traction; MEMS; MVT corrections; biaxial accelerometer; fluid damping; microelectro-mechanical-systems; mixed velocity traction; multipole boundary element method; slip boundary conditions; traction integral equations; velocity integral equations; Accelerometers; Boundary conditions; Boundary element methods; Damping; Frequency; Integral equations; Large-scale systems; Micromechanical devices; Robustness; Stators;
Conference_Titel :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location :
Como
Print_ISBN :
1-4244-0275-1
DOI :
10.1109/ESIME.2006.1644006
