Title :
On the application of the BGK model to the simulation of fluid structure interaction in MEMS
Author :
Cercignani, Carlo ; Frangi, Attilio ; Lorenzani, Silvia ; Frezzotti, Aldo
Author_Institution :
Politecnico di Milano
Abstract :
A three-dimensional quasi-static Stokes model, with a correction based on the kinetic theory of rarefied gas, is used to evaluate the damping forces exerted by gas flows on the moving surfaces of micromechanical structures in a wide range of pressures. Numerical results arc compared with the experimental data collected on a silicon biaxial accelerometer in the continuum and transitional flow regimes
Keywords :
accelerometers; damping; microfluidics; rarefied fluid dynamics; silicon; BGK model; MEMS; biaxial accelerometer; continuum flow; damping forces; fluid structure interaction; gas flows; kinetic theory; quasistatic Stokes model; rarefied gas; transitional flow; Accelerometers; Boundary conditions; Damping; Electrodes; Equations; Fluid flow; Kinetic theory; Micromechanical devices; Silicon; Viscosity;
Conference_Titel :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location :
Como
Print_ISBN :
1-4244-0275-1
DOI :
10.1109/ESIME.2006.1644007
