Title :
Pulse actuation-readout scheme for bulk disk resonator based mass sensor
Author :
Cagliani, Alberto ; Tang, Meng ; Davis, Zachary J.
Author_Institution :
Dept. of Micro-& Nanotechnol., Danish Tech. Univeristy, Lyngby, Denmark
Abstract :
In the framework of developing an innovative label-free sensor for multyarrayed biodetecion applications, we demonstrate a novel technique for real-time tracking of the resonance frequency of a capacitive bulk disk resonator based mass sensor. The sensor is based on a polysilicon disk which shows a Q-factor of 3100 in air at 67.2 MHz, which is actuated electrostatically. The charged resonator is driven into resonance by a sinusoidal burst of only 200 cycles, and the free vibrating signal of the device is recorded with an oscilloscope. This scheme is much simpler, compared to a standard network analyzer scheme or the closed loop schemes, to extract the resonance frequency of the sensor, since only a function generator and an oscilloscope are used. The pulse setup allows us to achieve a temporal resolution of 0.01 seconds with a frequency noise floor of 1 kHz. Finally, a drop of glycerol was placed on the resonator surface and the evaporation has been monitored, demonstrating a mass resolution of 256 fg.
Keywords :
mass measurement; microsensors; bulk disk resonator; free vibrating signal; function generator; mass sensor; oscilloscope; pulse actuation-readout scheme; real-time tracking;
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2010.5689957