Title :
Complete elastic characterization of a silica layer by Brillouin scattering
Author :
Signoriello, G. ; Beghi, M.G. ; Clerici, A. Rusconi ; Spinola, G.
Author_Institution :
Politecnico di Milano
Abstract :
Brillouin scattering, the scattering of light by ultrasonic waves, offers the possibility to probe the velocity of acoustic modes at sub-micrometric wavelength. From the acoustic properties the elastic properties can be derived. In the case of transparent films both bulk and surface acoustic waves can be measured. Brillouin scattering has been exploited to characterize a silica layer of micrometric thickness, thermally grown on a silicon substrate. The observation of different scattering geometries allowed to measure both the Young modulus and Poisson´s ratio of the silica film, together with its refractive index
Keywords :
Brillouin spectra; Poisson ratio; Young´s modulus; refractive index; silicon compounds; surface acoustic waves; thin films; Brillouin scattering; Poisson ratio; Young modulus; acoustic properties; bulk acoustic waves; elastic characterization; elastic properties; light scattering; refractive index; silica film; silica layer; surface acoustic waves; transparent films; ultrasonic waves; Acoustic measurements; Acoustic scattering; Acoustic waves; Brillouin scattering; Light scattering; Probes; Silicon compounds; Surface acoustic waves; Ultrasonic variables measurement; Wavelength measurement;
Conference_Titel :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location :
Como
Print_ISBN :
1-4244-0275-1
DOI :
10.1109/ESIME.2006.1644025
