Application of an Innovative Method for the Fatigue Characterisation of 15 μm Thick Epitaxial Polysilicon

Author

Ferraris, E. ; Fassi, I. ; Del Sarto, M.

Author_Institution

ITIA-CNR, Inst. of Ind. Technol. & Autom.-Nat. Res. Council, Milano

fYear

2006

fDate

24-26 April 2006

Firstpage

1

Lastpage

7

Abstract

The present work deals with the application of a new method for the on-chip fatigue characterization of micro electromechanical systems. The method is based on the fact that the 2^nd harmonic of comb actuated system is proportional to the driving velocity; thus an indirect monitoring of the system displacement is possible and the sample breaking can be registered by electrical measurements. The method has been applied for characterising the industrial material used by STMicroelectronics: a 15 mum thick epitaxial polysilicon and the experimental results have been compared to the literature data. In particular, the computed relative strength reduction to the cycles to failure follow the same trend derived in different loading conditions of frequency, thus confirming a not time depending failure mechanism

Keywords

fatigue; micromechanical devices; 15 micron; comb actuated system; electrical measurements; epitaxial polysilicon; industrial material; microelectromechanical systems; on-chip fatigue characterization; relative strength reduction; Condition monitoring; Councils; Failure analysis; Fatigue; Frequency; Microelectromechanical systems; Micromechanical devices; Silicon; Stress; System-on-a-chip;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on

Conference_Location

Como

Print_ISBN

1-4244-0275-1

Type

conf

DOI

10.1109/ESIME.2006.1644031

Filename

1644031