Title :
Optimization with process limits and application requirements for force sensors
Author :
Park, Sung-Jin ; Doll, Joseph C. ; Harjee, Nahid ; Pruitt, Beth L.
Author_Institution :
Stanford Univ., Stanford, CA, USA
Abstract :
Piezoresistive cantilevers are commonly used for force sensing. However, the design of piezoresistive cantilevers is complicated by coupling between many design parameters as well as design and operation constraints. Here, we discuss analytical models and optimization techniques for piezoresistive cantilevers.
Keywords :
force sensors; piezoresistive devices; application requirements; coupling; force sensors; piezoresistive cantilevers; process limits;
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2010.5689978
