DocumentCode :
2116535
Title :
Multi-Energy Domain Modeling of Microdevices: Virtual Prototyping by Predictive Simulation
Author :
Wachutka, Gerhard
Author_Institution :
Inst. for Phys. of Electrotechnol., Munich Univ. of Technol.
fYear :
2006
fDate :
24-26 April 2006
Firstpage :
1
Lastpage :
6
Abstract :
The rapid progress in microsystems technology is increasingly supported by MEMS-specific modeling methodologies and dedicated simulation tools. These do not only enable the visualization of fabrication processes and operational principles, but they also assist the designer in making decisions with a view to finding optimized microstructures under technological and economical constraints. Currently strong efforts are being made towards complete simulation platforms for the predictive simulation of microsystems, i.e. the "virtual fabrication" and "virtual experimentation, characterization and test" on the computer. We discuss the most important aspects to be focused on and practicable methodologies for microdevice and system modeling, in particular the consistent treatment of coupled fields and coupled domains required for setting up physically-based models for full system mixed-level simulation, and for the reliable validation and accurate calibration of the models
Keywords :
micromechanical devices; virtual prototyping; MEMS-specific modeling methodologies; microdevices; microsystems technology; mixed-level simulation; multienergy domain modeling; physically-based models; predictive simulation; virtual prototyping; Computational modeling; Computer simulation; Constraint optimization; Design optimization; Economic forecasting; Fabrication; Microstructure; Predictive models; Virtual prototyping; Visualization;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location :
Como
Print_ISBN :
1-4244-0275-1
Type :
conf
DOI :
10.1109/ESIME.2006.1644053
Filename :
1644053
Link To Document :
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