Nanotechnology in Silicon CMOS Fabrication and Nanoelectronics

Summary form only given. While novel device structures using nanomaterials such as carbon nanotubes and organic molecules may be far away, there are opportunities to use nanomaterials in solving critical issues faced by silicon CMOS downscaling. Two examples, both using carbon nanotubes, in chip cooling and developing interconnects were discussed. Following this, prospects of fabricating vertical and planar transistors using nanowires of silicon and germanium were discussed