Title :
Modeling the Electromechanical Response of RF-MEMS Switches
Author_Institution :
Fac. of Mech. Eng., Technion-Israel Inst. of Technol., Haifa
Abstract :
In this work systematic approaches for extracting parameters of the static and dynamic response of electrostatic switches are presented. A novel strategy enables accurate and efficient extraction of the static pull-in state of voltage and charge driven actuators. Another strategy enables to extract parameters of the dynamic pull-in while only considering static states of the system
Keywords :
electromechanical effects; electrostatic actuators; microswitches; microwave switches; RF-MEMS switches; charge driven actuators; dynamic pull-in voltage state; dynamic response; electromechanical response; electrostatic switches; parameter extraction; static response; Coplanar waveguides; Dielectrics; Electrostatic actuators; Equations; Mechanical engineering; Permittivity; Radiofrequency microelectromechanical systems; Structural beams; Switches; Voltage;
Conference_Titel :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location :
Como
Print_ISBN :
1-4244-0275-1
DOI :
10.1109/ESIME.2006.1644058
