Coplanar waveguide stub/filters on thin membranes and standard substrates

Author

Iordanescu, Sergh ; Bartolucci, Giancaslo ; Simion, Stefan ; Dragoman, Mircea

Author_Institution

Nat. Inst. for Res. & Dev. on Microtechnol., Bucharest, Romania

Volume

2

fYear

1997

fDate

7-11 Oct 1997

Firstpage

357

Abstract

Several coplanar waveguide series stubs and filter structures based on such stubs were designed and manufactured on standard semiinsulating GaAs substrates and thin GaAs membranes as well as on silicon based thin dielectric membranes. Coplanar waveguide circuits realized on thin membranes offer significant advantages over conventional coplanar or microstrip lines for monolithic or hybrid MIC applications

Keywords

III-V semiconductors; MMIC; coplanar waveguides; elemental semiconductors; gallium arsenide; hybrid integrated circuits; membranes; microwave filters; microwave integrated circuits; silicon; GaAs; Si; coplanar lines; coplanar waveguide circuits; coplanar waveguide series stubs; coplanar waveguide stub/filters; hybrid MIC applications; microstrip lines; monolithic MIC applications; silicon based thin dielectric membranes; standard semiinsulating GaAs substrates; substrates; thin GaAs membranes; thin membranes; Biomembranes; Circuits; Conductors; Coplanar waveguides; Dielectric substrates; Filters; Gallium arsenide; Impedance; Manufacturing; Microstrip;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International

Conference_Location

Sinaia

Print_ISBN

0-7803-3804-9

Type

conf

DOI

10.1109/SMICND.1997.651184

Filename

651184