Title :
Accurate post-fabrication trimming of ultra-compact resonators on silicon
Author :
Atabaki, Amir H. ; Eftekhar, Ali Asghar ; Askari, M. ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We experimentally demonstrate an accurate post-fabrication trimming technique for the correction of the optical phase of silicon photonic devices using a single fabrication step. Using this technique, we reduce the random resonance wavelength variation of ultra-compact silicon resonators by a factor of 6 to below 50 pm.
Keywords :
elemental semiconductors; integrated optics; optical fabrication; optical resonators; silicon; Si; accurate post-fabrication trimming; random resonance wavelength variation; silicon photonic devices; ultracompact resonators; Arrays; Films; Optical resonators; Photonics; Silicon; Silicon compounds;
Conference_Titel :
Photonics Conference (IPC), 2013 IEEE
Conference_Location :
Bellevue, WA
Print_ISBN :
978-1-4577-1506-8
DOI :
10.1109/IPCon.2013.6656620
