Title :
High Q silicon photonic crystal cavities for functional cladding materials
Author :
Prorok, Stefan ; Petrov, A.Yu. ; Eich, M. ; Jingdong Luo ; Jen, Alex K.
Author_Institution :
Inst. for Opt. & Electron. Mater., Hamburg Univ. of Technol., Hamburg, Germany
Abstract :
We demonstrate a novel method to define high Q silicon photonic crystal cavities with functional polymer cladding with ultra precision using spatially resolved electron beam bleaching of a chromophore doped polymer.
Keywords :
Q-factor; bleaching (materials processing); cladding techniques; electron beam effects; elemental semiconductors; integrated optics; optical fabrication; optical polymers; optical waveguides; photonic crystals; silicon; Si; chromophore doped polymer; functional cladding materials; high Q silicon photonic crystal cavities; spatially resolved electron beam bleaching; Bleaching; Cavity resonators; Lattices; Photonic crystals; Polymers; Silicon;
Conference_Titel :
Photonics Conference (IPC), 2013 IEEE
Conference_Location :
Bellevue, WA
Print_ISBN :
978-1-4577-1506-8
DOI :
10.1109/IPCon.2013.6656631
