Title :
Review of Imprinted Polymer Microrings as Ultrasound Detectors: Design, Fabrication, and Characterization
Author :
Cheng Zhang ; Sung-Liang Chen ; Tao Ling ; Guo, L. Jay
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
Detectors play a vital role in ultrasound sensing and imaging applications. With the rapid development of photoacoustic imaging technology in recent years, novel ultrasound detectors based on optical methods have gained increased attention, among which the imprinted polymer microring is a representative one. This review covers the device design, fabrication, and characterization, with an emphasis on how the imprinting-based fabrication methodology benefits the device performance, which further facilitates photoacoustic imaging and sensing applications. By carefully designing and fabricating the imprint mold, the imprinted polymer microring has a quality factor on the order of $10^{5}$ at 780 nm. The device has advantages such as wide acoustic bandwidth response from dc to 350 MHz at -3 dB, low noise equivalent detectable pressure, wide acceptance angle, and so on. The polymer microring has been successfully employed in applications such as photoacoustic imaging and real-time terahertz pulse detection.
Keywords :
Q-factor; photoacoustic effect; polymers; ultrasonic transducers; device characterization; device design; device fabrication; frequency 350 MHz; imprinted polymer microrings; optical methods; photoacoustic imaging technology; quality factor; ultrasound detectors; ultrasound sensing; wavelength 780 nm; Acoustics; Detectors; Optical resonators; Optical sensors; Optical waveguides; Polymers; Microring resonators; microring resonators; nano-imprint; photoacoustic imaging; polymer-based photonic devices; printed sensors; real time THz detection; ultrasound detectors;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2015.2421519