DocumentCode
2119960
Title
Nano-scaled electrical sensor devices for integrated circuit diagnostics
Author
Wright, R.G. ; Kirkland, Larry V.
Author_Institution
GMA Industries, Inc.
Volume
6
fYear
2003
fDate
March 8-15, 2003
Keywords
Automatic test equipment; Automatic testing; Chemical sensors; Circuit testing; Copper; Integrated circuit interconnections; Integrated circuit testing; Nanoscale devices; Printed circuits; Test equipment;
fLanguage
English
Publisher
ieee
Conference_Titel
Aerospace Conference, 2003. Proceedings. 2003 IEEE
ISSN
1095-323X
Print_ISBN
0-7803-7651-X
Type
conf
DOI
10.1109/AERO.2003.1235181
Filename
1235181
Link To Document