DocumentCode
2120034
Title
A lateral-axis tuning fork gyroscope with combined sensing capacitors and decoupled comb drive
Author
Guo, Z.Y. ; Zhao, Q.C. ; Lin, L.T. ; Cui, J. ; Yang, Z.C. ; Yan, G.Z. ; Chen, Z.Y.
Author_Institution
Nat. Key Lab. of Sci. & Lechnology on Micro/Nano Fabrication, Peking Univ. Beijing, Beijing, China
fYear
2010
fDate
1-4 Nov. 2010
Firstpage
627
Lastpage
630
Abstract
In this paper, a bulk micro machined lateral-axis TFG (tuning fork gyroscope) with improved architecture and combined mechanism sensing capacitors is reported. The combined sensing capacitors make the TFG have high sensitivity and good linearity even under wide input range and fabrication imperfection. Moreover, the decoupled comb drive, together with the improved architecture, can efficiently decouple the mode coupling. At atmospheric pressure, the TFG has a sensitivity of 0.1126mV/°/s even with unity gain. The nonlinearity is 0.7% with an input range of up to 1000°/s.
Keywords
capacitors; gyroscopes; micromechanical devices; vibrations; combined sensing capacitor; decoupled comb drive; fabrication imperfection; lateral axis tuning fork gyroscope; micromachined lateral axis TFG; mode coupling;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2010 IEEE
Conference_Location
Kona, HI
ISSN
1930-0395
Print_ISBN
978-1-4244-8170-5
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2010.5690113
Filename
5690113
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