A Combined On-Wafer Measurement Stand for Linear and Nonlinear Microwave Measurements

A novel approach is presented for a measurement system which is able to investigate the most relevant specifications of microwave circuits and components. The test stand is configured for on-wafer measurements up to 60 GHz, but can also be used for connectorized device measurements. The current capabilities of the system are power and gain measurements including harmonic power and harmomc impedances. Other capabilities include active load-pulling, the spectrum and phase noise of oscillators and noise figure measurements. Furthermore, a new calibration method has been developed which allows the measurement of absolute values of all power waves at the device under test without using frequency converting standards in the calibration.