Title :
Capacitance Calculation Of VLSI Multilevel Wiring Structures
Author :
Bauer ; Stiftinger, M. ; Selberherr, S.
Author_Institution :
Technical University of Vienna
Keywords :
Boundary conditions; Conducting materials; Conductors; Integrated circuit interconnections; Maxwell equations; Microelectronics; Parasitic capacitance; Very large scale integration; Visualization; Wiring;
Conference_Titel :
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN :
0-7803-1338-0
DOI :
10.1109/VPAD.1993.724760