DocumentCode :
2120571
Title :
Capacitance Calculation Of VLSI Multilevel Wiring Structures
Author :
Bauer ; Stiftinger, M. ; Selberherr, S.
Author_Institution :
Technical University of Vienna
fYear :
1993
fDate :
14-15 May 1993
Firstpage :
142
Lastpage :
143
Keywords :
Boundary conditions; Conducting materials; Conductors; Integrated circuit interconnections; Maxwell equations; Microelectronics; Parasitic capacitance; Very large scale integration; Visualization; Wiring;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN :
0-7803-1338-0
Type :
conf
DOI :
10.1109/VPAD.1993.724760
Filename :
724760
Link To Document :
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