DocumentCode
2121028
Title
Anomalous Short-channel Body Coefficients Due To Transient Enhanced Diffusion
Author
Rafferty, C.S. ; Giles, MD ; Vuong, H.H. ; Eshraghi, S.A. ; Pinto, MR ; Hillenius, SJ
Author_Institution
AT&T Bell Labs
fYear
1993
fDate
14-15 May 1993
Firstpage
148
Lastpage
149
Keywords
Boron; Doping profiles; Implants; Impurities; MOSFET circuits; Oxidation; Predictive models; Rapid thermal annealing; Semiconductor process modeling; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN
0-7803-1338-0
Type
conf
DOI
10.1109/VPAD.1993.724763
Filename
724763
Link To Document