DocumentCode :
2121371
Title :
Non-universal Roll-off Of MOSFET Mobility And VDS Effect In Mobility Measurement
Author :
Nishinohara, K. ; Tanimoto, H. ; Konishi, N. ; Takagi, S. ; Shigyo, N.
Author_Institution :
Toshiba Corporation
fYear :
1993
fDate :
14-15 May 1993
Firstpage :
176
Lastpage :
177
Keywords :
Charge carrier density; Current measurement; Electric variables; Ellipsometry; MOSFET circuits; Measurement errors; Research and development; Scattering; Threshold voltage; Ultra large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN :
0-7803-1338-0
Type :
conf
DOI :
10.1109/VPAD.1993.724776
Filename :
724776
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2121371
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