A Vector Corrected High Power On-Wafer Measurement System with a Frequency Range for the Higher Harmomcs up to 40 GHz

A high power on-wafer measurement system based on the new microwave transition analyzer (MTA) HP 71500A has been developed for the complete characterization of the large signal behavior of transistors. One key feature of the MTA based measurement system is that during power sweeps the harmonic behavior, up to 40 GHz, can be measured. To improve the accuracy of power measurements the vector measurement capability of the MTA is also utilized to allow full vector calibration of the measurement system. In addition, this vector measurement feature allows both the input reflection and the transmission coefficients of a device under test (DUT) to be measured as a function of frequency and input power. The input and output voltage waveforms at the transistor terminals are also calculated from the measurement data. This improved capability is possible since the vector calibrated measurement system allows both the measurement of the fundamental and the higher harmonics with respect to magnitude and phase.