Title :
Behaviour of a catalytic combustion methane gas sensor working on pulse mode
Author :
Xu, Lei ; Li, Tie ; Gao, Xiuli ; Wang, Yuelin ; Zheng, Rui ; Xie, Lei ; Lee, Lichung
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
Abstract :
A catalytic combustion type methane gas sensor with Pd-Pt/ γ-Al2O3 catalyst working on pulse voltage mode is investigated in this paper, after fabricated by micromachining and sol-gel process on a silicon substrate. In order to achieve low power consumption as well as high sensitivity, pulse voltage was applied to a bridge circuit consisted of the sensor, and the ratio of the gas sensitivity to power consumption was considered as an optimizing factor when selecting high level voltage. Outputs from four low level voltages indicate that the response time of the sensor decreases with the increasing low level voltage, while the sensitivity is almost 1.8 times of the value working on constant voltage in some cases, which path a way to improve the performance of the sensor.
Keywords :
catalysts; combustion; gas sensors; micromachining; optimisation; power consumption; sensitivity; silicon; sol-gel processing; catalyst; combustion; gas sensitivity; methane gas sensor; micromachining; optimization; power consumption; pulse voltage mode; silicon substrate; sol-gel process;
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2010.5690213