• DocumentCode
    2122793
  • Title

    Behaviour of a catalytic combustion methane gas sensor working on pulse mode

  • Author

    Xu, Lei ; Li, Tie ; Gao, Xiuli ; Wang, Yuelin ; Zheng, Rui ; Xie, Lei ; Lee, Lichung

  • Author_Institution
    State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
  • fYear
    2010
  • fDate
    1-4 Nov. 2010
  • Firstpage
    391
  • Lastpage
    394
  • Abstract
    A catalytic combustion type methane gas sensor with Pd-Pt/ γ-Al2O3 catalyst working on pulse voltage mode is investigated in this paper, after fabricated by micromachining and sol-gel process on a silicon substrate. In order to achieve low power consumption as well as high sensitivity, pulse voltage was applied to a bridge circuit consisted of the sensor, and the ratio of the gas sensitivity to power consumption was considered as an optimizing factor when selecting high level voltage. Outputs from four low level voltages indicate that the response time of the sensor decreases with the increasing low level voltage, while the sensitivity is almost 1.8 times of the value working on constant voltage in some cases, which path a way to improve the performance of the sensor.
  • Keywords
    catalysts; combustion; gas sensors; micromachining; optimisation; power consumption; sensitivity; silicon; sol-gel processing; catalyst; combustion; gas sensitivity; methane gas sensor; micromachining; optimization; power consumption; pulse voltage mode; silicon substrate; sol-gel process;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2010 IEEE
  • Conference_Location
    Kona, HI
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-8170-5
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2010.5690213
  • Filename
    5690213