Title :
Advanced Function-and Failure Analysis of Monolithic Integrated Travelling Wave Amplifiers by Scanning-Force-Microscopy
Author :
Bohm, C. ; Leyk, A. ; Sprengepiel, J. ; Kubalek, E.
Author_Institution :
Gerhard-Mercator-Universitÿt-GH Duisburg, Fachgebiet Werkstoffe der Elektrotechnik, BismarckstraÃ\x9fe 81, 47048 Duisburg, Germany
Abstract :
For the first time a scanning force microscope (SFM) test system is used for high resolution measurements of voltage distributions within a MMIC based on GaAs substrate. An advanced function- and failure analysis is made by comparison of on-gate voltage distributions and topographhy completed by point measurements of device internal signals up to 10 GHz. The results allow studies of device internal voltage distributions in correlation to topography with submicron resolution and gigahertz bandwidth.
Keywords :
Failure analysis; Force measurement; Gallium arsenide; MMICs; Microscopy; Signal resolution; Surfaces; System testing; Time measurement; Voltage measurement;
Conference_Titel :
Microwave Conference, 1994. 24th European
Conference_Location :
Cannes, France
DOI :
10.1109/EUMA.1994.337428