Title :
Growth of strained Ga1-xInxP layers on GaP(001) by gas source molecular beam epitaxy: comparison with the GaInAs/GaAs system
Author :
Wallart, X. ; Deresmes, D. ; Mollot, F.
Author_Institution :
Inst. d´´Electron. et de Microelectron. du Nord, CNRS, Villeneuve d´´Asq, France
Abstract :
Using Reflexion High Energy Electron Diffraction, Atomic Force Microscopy and Double Crystal X-ray Diffraction, the growth of Ga1-xInxP alloys on GaP (001) with x varying from 0.2 to 1 (InP) is investigated and compared to that of InGaAs alloys on GaAs (001). At 520°C, the transition from the relaxation mode via misfit dislocation generation to that via 3D growth occurs at lower x in the phosphide case (0.2) than in the arsenide one (0.25), For x<0.5, 3D growth leads to the development of wire-like structures along the [110] direction which can be related to recent results on the phosphide surface reconstructions. Finally, for the growth of InP on GaP at 520°C, the critical thickness is 2.1 MLs and we observe a small density of very large islands, in contrast to the InAs/GaAs case, At 400°C, the critical thickness decreases (1.7 MLs) as well as the island mean size whereas the density increases. We discuss this behavior in terms of surface energy
Keywords :
III-V semiconductors; X-ray diffraction; atomic force microscopy; chemical beam epitaxial growth; dislocations; gallium compounds; indium compounds; island structure; reflection high energy electron diffraction; semiconductor epitaxial layers; semiconductor growth; surface energy; 3D growth; 400 C; 520 C; GaInAs-GaAs; GaInAs/GaAs system; GaInP; GaP; GaP(001); atomic force microscopy; critical thickness; double crystal X-ray diffraction; gas source molecular beam epitaxy; growth; island mean size; islands; misfit dislocation generation; reflection high energy electron diffraction; relaxation mode; strained Ga1-xInxP layers; surface energy; wire-like structures; Atomic force microscopy; Electrons; Epitaxial growth; Gallium alloys; Gallium arsenide; Image reconstruction; Indium phosphide; Substrates; Temperature; X-ray diffraction;
Conference_Titel :
Indium Phosphide and Related Materials, 2000. Conference Proceedings. 2000 International Conference on
Conference_Location :
Williamsburg, VA
Print_ISBN :
0-7803-6320-5
DOI :
10.1109/ICIPRM.2000.850274