Effect of SiO2 additive as inhibitor on crystalline structure and H2S sensing performance of CuO-Au-SnO2 thin film prepared by liquid phase deposition

In situ SiO₂-doped SnO₂ thin films have been prepared by liquid phase deposition method. The effect of SiO₂ additive on the surface morphology and crystalline structural of the thin films were investigated by grazing incident angle X-ray diffraction (GIAXRD) and scanning electron microscopy (SEM). In the characteristics of sensing response, the SiO₂-doped CuO Au-SnO₂ gas sensors (Si/Sn = 0.25 and 0.33) have greater sensitivity and shorter response time than CuO-Au-SnO₂ gas sensor. However, the doped CuO-Au-SnO₂ gas sensors (Si/Sn = 0.33) can obtained better sensitivity (S = 67 for 2ppm) and response time (t90% <; 3 s).