DocumentCode
2124416
Title
Research and implementation of the interface a data collection management
Author
Ye, Jiafa ; Liu, Mingzhe ; Wang, Yanan
Author_Institution
Grad. Univ. of Chinese Acad. of Sci., Beijing, China
fYear
2012
fDate
21-23 April 2012
Firstpage
1996
Lastpage
1999
Abstract
According to the requirement of equipment data acquisition of semiconductor manufacturing equipment in the factory automation, this paper presents a new method to acquire the equipment data, which is based on the SEMI Interface A for data collection management. The method defines how to collect the information which we need through the use of a named data collection plan. The testing results show that the method meets the requirement of equipment data acquisition in the factory automation.
Keywords
computer interfaces; data acquisition; factory automation; production engineering computing; semiconductor device manufacture; SEMI interface A; data collection management; data collection planning; equipment data acquisition; factory automation; semiconductor manufacturing equipment; Data acquisition; Data models; Manufacturing automation; Materials; Simple object access protocol; Standards; XML; Interface A; data collection; factory automation; semiconductor equipment;
fLanguage
English
Publisher
ieee
Conference_Titel
Consumer Electronics, Communications and Networks (CECNet), 2012 2nd International Conference on
Conference_Location
Yichang
Print_ISBN
978-1-4577-1414-6
Type
conf
DOI
10.1109/CECNet.2012.6201898
Filename
6201898
Link To Document