DocumentCode
2124490
Title
A critical review of series resistances extraction methods in advanced bipolar transistors
Author
Popescu, A.E. ; Ionescu, A.M. ; Rusu, A. ; Chovet, A. ; Steriu, D. ; Tudor, B.
Author_Institution
Lab. de Phys. des Composants a Semicond., ENSERG, Grenoble, France
Volume
2
fYear
1996
fDate
9-12 Oct 1996
Firstpage
535
Abstract
This paper gives a critical review of some of the most widely used series resistance extraction methods based essentially on static curves revealed by state-of-the-art bipolar transistors: polysilicon-emitter bipolar junction transistors (BJTs) with “normal” (Al) and TiSi2 contacts. An unusual current-dependence of series resistances in polysilicon emitter transistors is also reported
Keywords
bipolar transistors; electric resistance measurement; elemental semiconductors; impact ionisation; silicon; Al contacts; Al-Si; TiSi2 contacts; TiSi2-Si; advanced bipolar transistors; bipolar junction transistors; current-dependence; impact ionisation method; polysilicon-emitter BJT; series resistances extraction methods; static curves; Bipolar transistors; Contact resistance; Current measurement; Electrical resistance measurement; Impact ionization; Insulation; Microelectronics; Q measurement; System testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1996., International
Conference_Location
Sinaia
Print_ISBN
0-7803-3223-7
Type
conf
DOI
10.1109/SMICND.1996.557435
Filename
557435
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