Title :
Wafer level optoelectronic testing for DFB laser diodes
Author :
Heffner, William R. ; Robertson, Alex
Author_Institution :
Microelectron. Group, Lucent Technol., Reading, PA, USA
Abstract :
We have developed a testing methodology for DFB lasers and the Electro-Absorption Modulated Laser (EML) in particular which circumvents some of the previously assumed barriers to facetless wafer level testing of edge emitting laser devices. These new wafer level tests are providing manufacturing with a variety of device performance parameters on both the laser and the modulator while embedded in the wafer. While the wafer level parameters are not expected to be identical to their final facet coated CHIP values they show excellent correlation between several important WAFER and CHIP parameters. This paper will describe how we measure facetless, in-wafer laser and modulator characteristics on our wafers and review the correlation and successes we have had during implementation in production
Keywords :
distributed feedback lasers; electro-optical modulation; electroabsorption; laser variables measurement; semiconductor device testing; semiconductor lasers; DFB laser diode; edge emitting laser device; electroabsorption modulated laser; wafer level optoelectronic testing; Diode lasers; Distributed feedback devices; Face detection; Laser feedback; Laser modes; Lasers and electrooptics; Semiconductor device measurement; Semiconductor lasers; Testing; Waveguide lasers;
Conference_Titel :
Indium Phosphide and Related Materials, 2000. Conference Proceedings. 2000 International Conference on
Conference_Location :
Williamsburg, VA
Print_ISBN :
0-7803-6320-5
DOI :
10.1109/ICIPRM.2000.850326