DocumentCode
2125578
Title
Self-patterned gold electroplated multicapillary separation columns
Author
Zareie, Hosein ; Alfeeli, Bassam ; Zareian-Jahromi, M. Amin ; Agah, Masoud
Author_Institution
Dept. of Electr. & Comput. Eng., VT MEMS Lab., Blacksburg, VA, USA
fYear
2010
fDate
1-4 Nov. 2010
Firstpage
1526
Lastpage
1529
Abstract
This paper reports on a method for self-patterned electroplating to selectively deposit gold on vertical surfaces of microfabricated silicon structures. This method was developed out of the effort to realize microfabricated multicapillary columns (μMCC) for chromatographic separation aimed for handheld chemical analysis. Results showed the successful selective vertical wall electroplating of μMCCs comprising an unprecedented number of channels (8 and 16). The μMCCs were functionalized using self-assembly of thiol groups and evaluated for their chromatographic performance. μMCCs demonstrated high separation efficiency as indicated by the 6500/m theoretical plate number and proved to have high sample capacities, which increases with the number of capillaries operating in parallel in these MEMS columns.
Keywords
capillarity; chromatography; electroplating; gold; microfabrication; micromechanical devices; self-assembly; Au; MEMS columns; Si; chemical analysis; chromatographic separation; microfabricated multicapillary columns; microfabricated silicon structures; multicapillary separation columns; selective deposition; self-assembly; self-patterned electroplating; theoretical plate number; thiol groups; vertical surfaces;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2010 IEEE
Conference_Location
Kona, HI
ISSN
1930-0395
Print_ISBN
978-1-4244-8170-5
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2010.5690326
Filename
5690326
Link To Document