• DocumentCode
    2125578
  • Title

    Self-patterned gold electroplated multicapillary separation columns

  • Author

    Zareie, Hosein ; Alfeeli, Bassam ; Zareian-Jahromi, M. Amin ; Agah, Masoud

  • Author_Institution
    Dept. of Electr. & Comput. Eng., VT MEMS Lab., Blacksburg, VA, USA
  • fYear
    2010
  • fDate
    1-4 Nov. 2010
  • Firstpage
    1526
  • Lastpage
    1529
  • Abstract
    This paper reports on a method for self-patterned electroplating to selectively deposit gold on vertical surfaces of microfabricated silicon structures. This method was developed out of the effort to realize microfabricated multicapillary columns (μMCC) for chromatographic separation aimed for handheld chemical analysis. Results showed the successful selective vertical wall electroplating of μMCCs comprising an unprecedented number of channels (8 and 16). The μMCCs were functionalized using self-assembly of thiol groups and evaluated for their chromatographic performance. μMCCs demonstrated high separation efficiency as indicated by the 6500/m theoretical plate number and proved to have high sample capacities, which increases with the number of capillaries operating in parallel in these MEMS columns.
  • Keywords
    capillarity; chromatography; electroplating; gold; microfabrication; micromechanical devices; self-assembly; Au; MEMS columns; Si; chemical analysis; chromatographic separation; microfabricated multicapillary columns; microfabricated silicon structures; multicapillary separation columns; selective deposition; self-assembly; self-patterned electroplating; theoretical plate number; thiol groups; vertical surfaces;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2010 IEEE
  • Conference_Location
    Kona, HI
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-8170-5
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2010.5690326
  • Filename
    5690326