Title :
Determining the reference impedance of on-wafer TLR calibrations on tossy substrates
Author :
Gillon, R. ; Raskin, J.P. ; Vanhoenacker, D. ; Colinge, J.P.
Author_Institution :
Universite catholique de Louvain, Laboratoire d´´Hyperfrequences
Abstract :
This paper presents an efficient reference impedance determination method, which is applicable to TLR calibrations performed on a wide variety of substrates, including those consisting of low resistivity material. The method is shown to be valid up to 40 GHz. It is based on the comparison of DC-resistance and scattering-parameter measurements of a resistor, a short and an open.
Keywords :
CMOS technology; Calibration; Conductivity; Electrical resistance measurement; Impedance measurement; MMICs; Resistors; Scattering parameters; Silicon on insulator technology; Substrates;
Conference_Titel :
Microwave Conference, 1996. 26th European
Conference_Location :
Prague, Czech Republic
DOI :
10.1109/EUMA.1996.337545
