Generation of Reactive Oxygen Species in Helium–Oxygen Radio-Frequency Discharges at Atmospheric Pressure

Reactive oxygen species (ROS) generated in atmospheric plasmas are believed to play an important role in plasma medicine and related areas. In this paper, we explored a fluid model to investigate the production and destruction of ROS in atmospheric radio-frequency (RF) discharges with helium-oxygen mixture as working gas; to speed up the computation, only 17 species and 48 reactions are considered in plasmas. At a given applied voltage, the variations of ROS depending on the oxygen admixture are discussed and the key reactions related to the generation of ROS are further confirmed. Through increasing the applied voltage, the evolution of ROS based on the simulation results are also given. The simulation data agree well with the experimental measurements.