Fabrication of plasmonics Si solar cells based on indium nanoparticles and TiO2 space layer

We demonstrate experimentally the photovoltaic performance enhancement of the plasmonics silicon solar cell based on nano-sized indium-particles and different thickness of TiO₂ space layer. The reflectance, photo-current and external quantum efficiency are measured and compared at each stages of device processing. The conversion efficiencies enhancing of 17.78% and of 47.85% are obtained as the solar cell with indium nanoparticles on a 10-nm and a 59.5-nm thick TiO₂ space layer, respectively, compared to the solar cell without coated a TiO₂ layer. Furthermore, the plasmonics conversion efficiencies depend on the thickness of space layer are also demonstrated that the increasing by 15.46% and 6.08% for the solar cells with 10-nm and a 59.5-nm thick TiO₂ space layer, respectively.