A low loss single-pole twelve-throw radio frequency microelectromechanical systems switch

Author

Kang, S. ; Jang, K. ; Chun, K. ; Kim, H.C.

Author_Institution

Sch. of Electr. Eng., Seoul Nat. Univ., Seoul, South Korea

fYear

2010

fDate

1-4 Nov. 2010

Firstpage

1474

Lastpage

1477

Abstract

This paper presents a method for improvements of radio frequency (RF) microelectromechanical systems (MEMS) switch which was previously reported at MEMS 2008 and introduces a single-pole twelve-throw (SP12T) switch based on improved switch. The proposed switch was driven by a double stop (DS) comb drive, with a lateral resistive contact. Additionally, the proposed switch was designed to be bi directionally actuated. A forward actuation connects between signal lines and contact part, and the output becomes on-state. A reverse actuation connects between ground lines and contact part, and the output becomes off-state. This can make ground lines have same bias, and improve the RF characteristics. The 2 stage cascade type SP12T switch was developed based on an arrangement of the proposed RF MEMS switches.

Keywords

electrical contacts; microactuators; microswitches; RF MEMS switches; comb drive; contact part; forward actuation; microelectromechanical system; radiofrequency switch; resistive contact; reverse actuation; signal lines; single-pole twelve-throw switch;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2010 IEEE

Conference_Location

Kona, HI

ISSN

1930-0395

Print_ISBN

978-1-4244-8170-5

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2010.5690362

Filename

5690362