Title :
Micromechanics in indium phosphide for opto electrical applications
Author_Institution :
Dept. of Mater. Sci., Uppsala Univ., Sweden
Abstract :
Indium phosphide based micro opto electro mechanics (MOEMs) hold promises of micromechanical applications in the longer wavelength region, and in particular for applications in telecommunication networks. Recent work on indium phosphide micromechanics is presented: the mechanics, the micromachining and fabrication, and possible future devices and applications
Keywords :
III-V semiconductors; indium compounds; micromachining; optoelectronic devices; telecommunication networks; InP; fabrication; micromachining; micromechanical applications; opto electrical applications; telecommunication networks; Gallium arsenide; III-V semiconductor materials; Indium phosphide; Micromachining; Micromechanical devices; Optical fiber sensors; Optical sensors; Optical surface waves; Silicon; Thermal sensors;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651240
