A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor

Author

Ji, Lujun ; Zhu, Yong ; Moheimani, S. O Reza ; Yuce, Mehmet Rasit

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia

fYear

2010

fDate

1-4 Nov. 2010

Firstpage

1464

Lastpage

1467

Abstract

This paper presents the design, fabrication and characterization of a micromachined two degrees-of-freedom (2DOF) nanopositioner. The proposed micro-electro-mechanical system (MEMS) stage, consisting of comb-drive actuators and on-chip capacitive displacement sensors in both X and Y directions, can simultaneously actuate the microstage and sense the corresponding displacements. A commercial capacitive readout IC (MS3110) is used for the open-loop capacitive sensing. The first resonance frequency of the stage is measured to be 4.24 kHz. The positioner has a dynamic range from -6.27 μm to +6.64 μm at an actuation voltage of 100 V.

Keywords

capacitive sensors; displacement measurement; frequency measurement; integrated circuits; microactuators; nanopositioning; nanosensors; open loop systems; readout electronics; capacitive readout IC; comb-drive actuator; integrated capacitive displacement sensor; microelectromechanical system; micromachined 2DOF nanopositioner; on-chip capacitive displacement sensors; open-loop capacitive sensing; resonance frequency measurement; two degrees-of-freedom nanopositioner;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2010 IEEE

Conference_Location

Kona, HI

ISSN

1930-0395

Print_ISBN

978-1-4244-8170-5

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2010.5690373

Filename

5690373