Title :
Optical properties of hard DLC layers
Author :
Taga, A. ; Morosanu, C. ; Tolmatchev, A.V. ; Yastrebov, S.G.
Author_Institution :
Fac. of Phys., Bucharest Univ., Romania
Abstract :
Hard DLC layers have been deposited by RF plasma deposition and their optical parameters have been measured by ellipsometric methods. The optical absorption spectrum was analyzed and discussed the applicability of the Demichelis model of gaussian-like π bans. The content of sp3 bonded carbon atoms M as estimated using the method described by Demichelis
Keywords :
absorption coefficients; carbon; ellipsometry; plasma CVD coatings; visible spectra; C; Demichelis model; RF plasma deposition; diamondlike carbon; ellipsometric methods; gaussian-like π bans; hard DLC layers; optical absorption spectrum; optical properties; Absorption; Atom optics; Chemicals; Gaussian processes; Optical films; Optical pumping; Plasma density; Plasma measurements; Plasma properties; Radio frequency;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651253
