Title :
Correction of the interpolation error of quadro-phase detection in interferometry
Author :
Smid, M. ; Hakl, F. ; Sebek, P. ; Balling, P.
Author_Institution :
Czech Metrology Inst., Praha, Czech Republic
Abstract :
Laser interferometers using quadro-phase detectors for the fringe counting are frequently used for ultra-precise displacement measurements. The accuracy of interferometers in nanometrology is limited mainly by the interpolation error of the detector system. The new method based on applications of curve fitting using nonlinear last square method was developed for correcting the interpolation error of quadro-phase detectors. The results from the experimental data obtained in interferometrical comparator CMI IK-1 are presented.
Keywords :
calibration; curve fitting; displacement measurement; error compensation; interpolation; least squares approximations; light interferometers; light interferometry; measurement by laser beam; measurement errors; CMI IK-1; accuracy; correction; curve fitting; fringe counting; interferometrical comparator; interpolation error; laser interferometers; nanometrology; nonlinear last square method; quadro-phase detectors; radiometry; ultra-precise displacement measurement; Clocks; Computer errors; Detectors; Displacement measurement; Distortion measurement; Error correction; Interferometers; Interferometry; Interpolation; Q measurement;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2000 Conference on
Conference_Location :
Sydney, NSW, Australia
Print_ISBN :
0-7803-5744-2
DOI :
10.1109/CPEM.2000.850979
