DocumentCode
2129352
Title
Micro-devices based on spectrum shape deformation
Author
Enguang, Dai
Author_Institution
Key Lab. for the Phys. & Chem. of Nanodevices, Peking Univ., Beijing, China
fYear
2010
fDate
1-4 Nov. 2010
Firstpage
236
Lastpage
239
Abstract
Traditionally, resonate device related sensors are mainly for the detection of resonate peak shift resulting from outer environment disturbance. Besides, there are other types of sensors based upon the peak position detection as well. Electrical frequency spectrum shape or optical spectrum shape deformation are seldom employed as measurand. A new point of view on sensors will be demonstrated both in electrical domain and in optical domain. Different from the detection of the resonate peak, spectrum shape monitoring can provide us with different information.
Keywords
deformation; micromechanical devices; sensors; electrical frequency spectrum shape deformation; micro-device; optical spectrum shape deformation; peak position detection; resonate peak shift;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2010 IEEE
Conference_Location
Kona, HI
ISSN
1930-0395
Print_ISBN
978-1-4244-8170-5
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2010.5690461
Filename
5690461
Link To Document