Micro-devices based on spectrum shape deformation

Traditionally, resonate device related sensors are mainly for the detection of resonate peak shift resulting from outer environment disturbance. Besides, there are other types of sensors based upon the peak position detection as well. Electrical frequency spectrum shape or optical spectrum shape deformation are seldom employed as measurand. A new point of view on sensors will be demonstrated both in electrical domain and in optical domain. Different from the detection of the resonate peak, spectrum shape monitoring can provide us with different information.