Title :
Design of MEMS mass sensors based of flexural phononic crystals
Author :
Luschi, Luca ; Pieri, Francesco
Author_Institution :
Dipt. di Ing. dell´Inf., Univ. di Pisa, Pisa, Italy
Abstract :
In this work, a piezoelectrically actuated MEMS flexural phononic crystal (PC) mass sensor aimed at biosensing applications, and based on a single crystal silicon beam with periodic perforations, is presented. We introduce a transmission matrix approach based on the Timoshenko beam theory suited for the fast design of such devices. The calculated transmission spectra are in excellent agreement with FEM simulations. A preliminary estimate of the device sensitivity, assuming the prostate specific antigen (PSA) as the target analyte, is reported.
Keywords :
biosensors; elemental semiconductors; finite element analysis; mass measurement; microsensors; phononic crystals; piezoelectric actuators; piezoelectric transducers; silicon; FEM simulation; PC; PSA; Si; Timoshenko beam theory; biosensing application; flexural phononic crystal; periodic perforation; piezoelectrically actuated MEMS flexural phononic crystal mass sensor; prostate specific antigen; single crystal silicon beam; target analyte; transmission matrix approach; Crystals; Finite element analysis; Frequency response; Photonic band gap; Sensitivity; Sensors; Solids; MEMS; mass sensors; phononic crystals; resonant sensors;
Conference_Titel :
AISEM Annual Conference, 2015 XVIII
Conference_Location :
Trento
DOI :
10.1109/AISEM.2015.7066802
