DocumentCode
2130241
Title
Hybrid interferometer for control of three degrees of freedom
Author
Lawall, J. ; Howard, L. ; Deslattes, R.D. ; Chien-Ming Wu
Author_Institution
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fYear
2000
fDate
14-19 May 2000
Firstpage
353
Lastpage
354
Abstract
We describe a quadruple Michelson heterodyne interferometer for measuring longitudinal displacement, pitch, and yaw of a target mirror relative to a stationary one. A Fabry-Perot interferometer provides independent control of systematic errors.
Keywords
Fabry-Perot interferometers; Michelson interferometers; displacement measurement; heterodyne detection; measurement errors; mirrors; Fabry-Perot interferometer; X-ray interferometry; longitudinal displacement; mirror; pitch; position sensing; quadruple Michelson heterodyne interferometer; systematic errors; yaw; Control systems; Displacement measurement; Fabry-Perot interferometers; Frequency measurement; Laser beams; Measurement standards; Mirrors; Optical interferometry; Optical mixing; Optical reflection;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 2000 Conference on
Conference_Location
Sydney, NSW, Australia
Print_ISBN
0-7803-5744-2
Type
conf
DOI
10.1109/CPEM.2000.851021
Filename
851021
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