DocumentCode
2130511
Title
Micromachined silicon radiation sensors - Part 1: Design and experimental characterization
Author
Bagolini, A. ; Boscardin, M. ; Conci, P. ; Crivellari, M. ; Giacomini, G. ; Mattedi, F. ; Piemonte, C. ; Ronchin, S. ; Zorzi, N. ; Benkechkache, M.A. ; Dalla Betta, G.-F. ; Mendicino, R. ; Pancheri, L. ; Povoli, M. ; Sultan, D.M.S.
Author_Institution
Centro per i Mater. e i Microsistemi, Fondazione Bruno Kessler, Trento, Italy
fYear
2015
fDate
3-5 Feb. 2015
Firstpage
1
Lastpage
4
Abstract
Silicon radiation sensors fabricated with micromachining technologies offer a number of advantages compared to their planar counterparts, making them appealing for an increasing number of applications. This paper provides an overview of the most interesting developments in this field by Fondazione Bruno Kessler in collaboration with the University of Trento.
Keywords
elemental semiconductors; micromachining; microsensors; radiation detection; silicon; Fondazione Bruno Kessler; University of Trento; micromachined silicon radiation sensor; Cavity resonators; Detectors; Neutrons; Sensor phenomena and characterization; Silicon; Three-dimensional displays; 3D sensors; TCAD simulations; micromachining; silicon radiation sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
AISEM Annual Conference, 2015 XVIII
Conference_Location
Trento
Type
conf
DOI
10.1109/AISEM.2015.7066825
Filename
7066825
Link To Document