DocumentCode :
2131031
Title :
An integrated thermal sensor platform for multi-variable detection
Author :
del Cesta, F. ; Bruschi, P. ; Piotto, M.
Author_Institution :
Dipt. di Ing. dell´Inf., Univ. of Pisa, Pisa, Italy
fYear :
2015
fDate :
3-5 Feb. 2015
Firstpage :
1
Lastpage :
4
Abstract :
A single chip sensor platform, including different kind of thermal sensors and advanced readout electronic circuits, is described. The chip is obtained using a two-step procedure: (i) the preliminary die is fabricated by a standard microelectronic process (STMicroelectronics BCD6s); (ii) post-processing is applied to the die to introduce thermal insulation between the sensor elements and the substrate. The sensors are finalized to detect flow rate, pressure and acoustical particle velocity. The electronic circuits include two low noise amplifiers and a programmable current source for sensor biasing.
Keywords :
acoustic wave velocity measurement; flow measurement; low noise amplifiers; microfabrication; microsensors; pressure measurement; readout electronics; temperature sensors; thermal insulation; STMicroelectronics BCD6; acoustical particle velocity detection; advanced readout electronic circuits; chip sensor; flow rate detection; integrated thermal sensor element; low noise amplifiers; multivariable detection; pressure detection; programmable current source; sensor biasing; standard microelectronic process; thermal insulation; Etching; Heating; Insulation; Metals; Substrates; Thermal sensors; Wires; MEMS; multi sensor platform; thermal sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
AISEM Annual Conference, 2015 XVIII
Conference_Location :
Trento
Type :
conf
DOI :
10.1109/AISEM.2015.7066844
Filename :
7066844
Link To Document :
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