Title :
MEMS microhotplate temperature sensor BIST: Importance and applications
Author :
Afridi, M. Yaqub ; Geist, Jon
Author_Institution :
Semicond. Electron. Div., Nat. Inst. of Stand. & Technol. (NIST), Gaithersburg, MD, USA
Abstract :
This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate-based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensors, including resistance temperature detectors (RTD), microhotplate thermal efficiency, and Thermocouples. A calibration technique is discussed and conclusions are given.
Keywords :
built-in self test; temperature sensors; thermocouples; BIST; MEMS; microhotplate temperature sensor; microhotplate thermal efficiency; resistance temperature detectors; thermocouples;
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2010.5690549
