Design and modelling for a thermal flow sensor

Author

Popescu, Dan S. ; Mihalea, Bogdan ; Lerch, Philippe ; Renaud, Philippe ; Dascalu, Dan C.

Author_Institution

Dept. of Electron., Univ. Politehnica Bucharest, Romania

Volume

2

fYear

1997

fDate

7-11 Oct 1997

Firstpage

511

Abstract

Design and modelling have been made for a new type of integrated flow sensor for implementation in a CMOS compatible technology. The sensor is designed for both gas and fluid flow sensing in applications with transient velocity and temperature profiles. This appear also in microfluidics where there is a pulsating flow when drive is made with micropumps. The sensor is analysed for fluid flow and heat transfer. Modelling and optimisation of the sensor give results for the necessary geometrical parameters and materials of the sensor for maximising the sensibility in applications with a known fluid and in a given domain of fluid velocities and temperatures

Keywords

flow measurement; heat transfer; design; fluid flow sensing; gas flow sensing; modelling; pulsating flow; temperature profiles; thermal flow sensor; transient velocity profiles; CMOS technology; Fluid flow; Gas detectors; Heat transfer; Microfluidics; Micropumps; Semiconductor device modeling; Solid modeling; Temperature sensors; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International

Conference_Location

Sinaia

Print_ISBN

0-7803-3804-9

Type

conf

DOI

10.1109/SMICND.1997.651295

Filename

651295