Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator

Author

Liu, Wenjing ; Zhu, Yiping ; Li, Jiping ; Virendrapal, A.S. ; Tang, Yongming ; Wang, Baoping ; Xie, Huikai

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

fYear

2010

fDate

1-4 Nov. 2010

Firstpage

2189

Lastpage

2192

Abstract

This paper presents a 2-axis scanning piezoelectric micromirror with zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel PZT with a Zr/Ti ratio of 53/47. The unimorph PZT actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 thin-film layers, which are released via undercutting the substrate silicon. Two-dimensional scans with a 4.8° scan range have been demonstrated at 2 V at 635 Hz (resonance).

Keywords

lead compounds; micromirrors; oxygen compounds; piezoelectric actuators; piezoelectric materials; platinum compounds; sol-gel processing; titanium compounds; zirconium compounds; 2-axis scanning piezoelectric micromirror; Pt-Ti-PZT-Pt-Ti-SiO₂; frequency 635 Hz; piezoelectric material; sol-gel PZT; substrate silicon; thin-film layer; tilt-and-lateral shift-free piezoelectric actuator; unimorph PZT actuation beam; voltage 2 V; PZT; piezoelectric actuator; piston motion; scanning micromirror; two-axis; zero initial tilt;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2010 IEEE

Conference_Location

Kona, HI

ISSN

1930-0395

Print_ISBN

978-1-4244-8170-5

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2010.5690601

Filename

5690601