Title :
An optimised planar Hall microsensor
Author :
Avram, Marioara ; Simion, George ; Iliescu, Ciprian ; Simion, Monica
Author_Institution :
Nat. Inst. of Res. & Dev. for Microtechnol., Bucharest, Romania
Abstract :
This paper contributes to the field of silicon Hall transducer with compensation of piezoresistive effect established by the mechanical stress in Hall device in the time of packaging. The voltage determined by the mechanical stress is the offset voltage which is approximately zero for the planar Hall sensor presented in this paper and it could be minimise by a specific design so that the angle between current direction are favourably chosen
Keywords :
Hall effect; elemental semiconductors; microsensors; piezoelectric transducers; silicon; Si; mechanical stress; offset voltage; optimised planar Hall microsensor; piezoresistive effect; Electron mobility; Equations; Magnetic sensors; Mechanical sensors; Microsensors; Piezoresistance; Silicon; Slabs; Stress; Voltage;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651301
