DocumentCode
2133688
Title
An optimised planar Hall microsensor
Author
Avram, Marioara ; Simion, George ; Iliescu, Ciprian ; Simion, Monica
Author_Institution
Nat. Inst. of Res. & Dev. for Microtechnol., Bucharest, Romania
Volume
2
fYear
1997
fDate
7-11 Oct 1997
Firstpage
523
Abstract
This paper contributes to the field of silicon Hall transducer with compensation of piezoresistive effect established by the mechanical stress in Hall device in the time of packaging. The voltage determined by the mechanical stress is the offset voltage which is approximately zero for the planar Hall sensor presented in this paper and it could be minimise by a specific design so that the angle between current direction are favourably chosen
Keywords
Hall effect; elemental semiconductors; microsensors; piezoelectric transducers; silicon; Si; mechanical stress; offset voltage; optimised planar Hall microsensor; piezoresistive effect; Electron mobility; Equations; Magnetic sensors; Mechanical sensors; Microsensors; Piezoresistance; Silicon; Slabs; Stress; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location
Sinaia
Print_ISBN
0-7803-3804-9
Type
conf
DOI
10.1109/SMICND.1997.651301
Filename
651301
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