Micro-Machined GCPW Resonators and Filters for Applications at Millimetric Wave Frequencles

S-parameter results of 93¿ micro-machined ground coplanar waveguide resonators and filters at millimetric wave frequencies are presented. The loaded and unloaded quality factors are approximately 118 and 356 respectively at Kaband. The GCPW resonators and filters were fabricated on a thin SiO2 membrane (suspended membrane) over an air-cavity defined in the silicon wafer. The importance of micromachined circuits is verified in low loss circuits at millimetric and sub-millimetric wave frequencies as filters and power combiners as well as oscillators with low phase noise spectrum.