Title :
Design of a PZT-based MEMS Rotman lens
Author :
Sinjari, Ahmad ; Chowdhury, Sazzadur
Author_Institution :
Dept. of Electr. & Comput. Eng., Windsor, Univ., Windsor, ON
Abstract :
The design of a MEMS Rotman lens that uses a high dielectric constant PZT (Lead Zirconium Titanate) thick film to fill the lens cavity has been presented. The 56 mum thick Rotman lens has a footprint area of 5.5x7.1 mm2, incorporates 3 beam ports, 5 array ports, and operates at 77 GHz. The small size of the Rotman lens beamformer enables to fabricate both the transmit and receive beamformers on the opposite sides of the same wafer to realize a compact MEMS based radar when integrated with necessary microelectronic circuits and microstrip antennas. Analytical simulation results show that the developed beamformer can resolve an angular resolution of up to four degrees. A fabrication procedure for the MEMS Rotman lens has been developed and verified by simulating in IntelliSuitetrade. This microscale implementation enables the Rotman lens to be used as an integral part of a radar unit for automotive collision avoidance applications.
Keywords :
dielectric materials; lead compounds; microlenses; radar equipment; road vehicle radar; thick films; IntelliSuite; PZT; PZT-based MEMS; Rotman lens; automotive collision avoidance; beamformers; compact MEMS based radar; dielectric constant thick film; microelectronic circuits; microstrip antennas; Circuit simulation; High-K gate dielectrics; Lenses; Micromechanical devices; Microstrip antennas; Optical design; Radar antennas; Thick films; Titanium compounds; Zirconium; Collision avoidance; MEMS; PZT; Radar; Rotman lens;
Conference_Titel :
Electrical and Computer Engineering, 2008. CCECE 2008. Canadian Conference on
Conference_Location :
Niagara Falls, ON
Print_ISBN :
978-1-4244-1642-4
Electronic_ISBN :
0840-7789
DOI :
10.1109/CCECE.2008.4564712
